Nano-imprinted subwavelength gratings as polarizing beamsplitters

Abstract Polarizing beamsplitters have numerous applications in optical systems, such as systems for freeform surface metrology. They are classically manufactured from birefringent materials or with stacks of dielectric coatings. We present a binary subwavelength-structured form-birefringent diffraction grating, which acts polarizing beamsplitter wide range incidence angles −30 ∘ …+30 . refine the general design method hybrid gratings. furthermore demonstrate manufacturing steps Soft-UV-Nanoimprint-Lithography, well experimental verification, that structure reliably beamsplitter. The results show contrast efficiency TE- and TM-polarization up to 1:18 first order, 34:1 zeroth order. grating potentially enables us realize integrated compact measurement common-path interferometers.